Specialty Gas Analysis : A Practical Guidebook

From Book News, Inc.
A concise presentation of current analytical methods and technology for the detection and analysis of specialty gases for trace level contaminants and impurities. The book is intended not only for researchers and analysts but for those in the semiconductor industry who can benefit from understanding what gases can be analyzed and what contaminants can be detected. Some of the topics included are a history of gas analysis, humidity measurement, the chromatographic analysis of trace atmospheric gases, and limits of detection. Book News, Inc.®, Portland, OR


Book Description
The semiconductor industry is moving toward gas-phase reagents, increasing the relative importance of gas purity. Anyone who deals in the manufacturing of these devices needs to understand the technology available for modern gas analysis. Most specialty gas vendors have some re in place for quality assurance, but these usually are very simplistic and outdated methods. No book was available that gave guidance on providing accurate, reproducible data on specialty gas products. This is the first book that provides an introduction to current analytical methods and equipment for the analysis of high- purity gases used in the semiconductor industry and related fields.


Book Info
Helps researchers familiarize with the methods and technology in this field, and helps newcomers get up to speed in a reasonable time. DLC: Gases Analysis.


The publisher, John Wiley & Sons
This is the first book to provide an introduction to current analytical methods and equipment for the analysis of high-purity gases used in the semiconductor industry and related fields. It will help researchers familiarize themselves with the methods and technology in this field, and help newcomers get up to speed in a reasonable time. In addition, it will assist those in the semiconductor industry who are not analysts, but who can benefit from understanding what gases can be analyzed, what contaminants can be detected, and what problems are involved in performing these type of analyses.


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A concise presentation of current analytical methods and technology for the detection and analysis of specialty gases for trace level contaminants and impurities. The book is intended not only for researchers and analysts but for those in the semiconductor industry who can benefit from understanding what gases can be analyzed and what contaminants can be detected. Some of the topics included are a history of gas analysis, humidity measurement, the chromatographic analysis of trace atmospheric gases, and limits of detection. Annotation c. by Book News, Inc., Portland, Or.


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