Physics of Submicron Lithography

From Book News, Inc.
A new stage in the development of microelectronics is connected with converting to devices of submicron size; processing materials into such small devices is possible with electron, ion, and x-ray lithographic methods--and this, according to Valiev (Academy of Sciences of the USSR), ". . . will unconditionally be the most important achievement in science and technology for the last quarter of the 20th century." The information presented here is for specialists in microelectronics who must equip, or reequip, themselves with knowledge of the physics of electron and ion beams and x-ray and ultraviolet radiation, including forming the beams and their interactions with matter. Annotation copyright Book News, Inc. Portland, Or.


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A new stage in the development of microelectronics is connected with converting to devices of submicron size; processing materials into such small devices is possible with electron, ion, and x-ray lithographic methods--and this, according to Valiev (Academy of Sciences of the USSR), ". . . will unconditionally be the most important achievement in science and technology for the last quarter of the 20th century." The information presented here is for specialists in microelectronics who must equip, or reequip, themselves with knowledge of the physics of electron and ion beams and x-ray and ultraviolet radiation, including forming the beams and their interactions with matter. Annotation c. Book News, Inc., Portland, OR (booknews.com)


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